Ground subsidence, mainly caused by over exploitation of groundwater and other underground resources, such as oil, gas and coal, occurs in many cities in China. The annual direct loss associated with subsidence across the country is estimated to exceed 100 million US dollar. Interferometric SAR (InSAR) is a powerful tool to map ground deformation at an unprecedented level of spatial detail. It has been widely used to investigate the deformation resulting from earthquakes, volcanoes and subsidence. Repeat-pass InSAR, however, may fail due to impacts of spatial decorrelation, temporal decorrelation and heterogeneous refractivity of atmosphere. In urban areas, a large amount of natural stable radar reflectors exists, such as buildings and engineering structures, at which radar signals can remain coherent during a long time interval. Interferometric point target analysis (IPTA) technique, also known as persistent scatterers (PS) InSAR is based on these reflectors. It overcomes the shortfalls in conventional InSAR. This paper presents a procedure for urban subsidence monitoring with IPTA. Calculation of linear deformation rate and height residual, and the non-linear deformation estimate, respectively, are discussed in detail. Especially, the former is highlighted by a novel and easily implemented 2-dimensional spatial search algorithm. Practically useful solutions that can significantly improve the robustness of IPTA, are recommended. Finally, the proposed procedure is applied to mapping the ground subsidence in Suzhou city, Jiangsu province, China. Thirty-four ERS-1/2 SAR scenes are analyzed, and the deformation information over 38,881 point targets between 1992 and 2000 are generated. The IPTA-derived deformation estimates correspond well with leveling measurements, demonstrating the potential of the proposed subsidence monitoring procedure based on IPTA technique. Two shortcomings of the IPTA-based procedure, e.g., the requirement of large number of SAR images and assumed linear plus non-linear deformation model, are discussed as the topics of further research.